An organization that supports the development and dissemination of innovative industrial systems that enable the production of various kinds of microdevices such as semiconductors and MEMS for high-mix low-volume production.


AIST Minimal Fab Shared Facilities Open to the Public

Minimal fab equipment for half-inch wafers (about 60 equipements) and analysis and evaluation equipment realized by local clean technology are located on the 4th floor of the CPS Research Building (Annex 2) at AIST Tokyo Waterfront .
The shared facilities have been opened to the public as the “Creative Minimal Fab (CMF)”
since January 2024, and are available for use.
If you wish to use the facilities, please contact us at the following URL.